(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT
NL NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA |
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Designated Validation States: |
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GE KH MA MD TN |
(30) |
Priority: |
25.04.2023 US 202363498214 P
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(71) |
Applicant: Applied Materials, Inc. |
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Santa Clara, California 95054 (US) |
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(72) |
Inventors: |
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- LIN, Yu-Hsin
Hsinchu Science Park Hsinchu City, 30076 (TW)
- CHEN, Chung-chia
Hsinchu Science Park Hsinchu City, 30076 (TW)
- LEE, Jungmin
Santa Clara, California 95054 (US)
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(74) |
Representative: Zimmermann & Partner
Patentanwälte mbB |
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Postfach 330 920 80069 München 80069 München (DE) |
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