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EP 4 578 041 A1

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(43) Date of publication: 02.07.2025 Bulletin 2025/27 (21) Application number: 23754157.8 (22) Date of filing: 02.08.2023

(51) International Patent Classification (IPC):  H01L 21/8234(2006.01) H01L 27/088(2006.01) H01L 27/06(2006.01) H01L 27/02(2006.01) H01L 21/822(2006.01) (52) Cooperative Patent Classification (CPC): H10D 84/038; H10D 88/01; H10D 84/016; H10D 84/0149; H10D 89/10; H10D 88/00; H10D 84/83 (86) International application number: PCT/EP2023/071386 (87) International publication number: WO 2024/041858 (29.02.2024 Gazette 2024/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 22.08.2022 US 202217821263 (71) Applicant: International Business Machines Corporation Armonk, New York 10504 (US)	(72) Inventors: ANDERSON, Brent Albany, New York 12203-3654 (US) JAGANNATHAN, Hemanth Albany, New York 12203-3654 (US) WANG, Junli Albany, New York 12203-3654 (US) CHU, Albert Albany, New York 12203-3654 (US) (74) Representative: IBM United Kingdom Limited  Intellectual Property Law Hursley Park Winchester, Hampshire SO21 2JN Winchester, Hampshire SO21 2JN (GB)