(19)
(11) EP 4 578 045 A1

(12)

(43) Date of publication:
02.07.2025 Bulletin 2025/27

(21) Application number: 23754091.9

(22) Date of filing: 21.07.2023
(51) International Patent Classification (IPC): 
H01L 23/522(2006.01)
H01L 23/00(2006.01)
H01L 23/64(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 23/5227; H01L 23/645; H01L 23/49822; H01L 25/16; H01L 23/49816; H10D 1/20
(86) International application number:
PCT/US2023/070720
(87) International publication number:
WO 2024/044438 (29.02.2024 Gazette 2024/09)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 25.08.2022 US 202263400971 P
22.02.2023 US 202318172975

(71) Applicant: QUALCOMM INCORPORATED
San Diego, California 92121-1714 (US)

(72) Inventors:
  • TSENG, Anshih
    San Diego, California 92121 (US)
  • ZOU, Peng
    San Diego, California 92121 (US)

(74) Representative: Klang, Alexander H. 
Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5
80538 München
80538 München (DE)

   


(54) WAFER LEVEL PACKAGING PROCESS FOR THIN FILM INDUCTORS