| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT
NL NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA |
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Designated Validation States: |
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GE KH MA MD TN |
| (30) |
Priority: |
05.09.2023 US 202363580598 P 10.11.2023 US 202363597957 P
|
| (71) |
Applicant: Brooks Automation US, LLC |
|
Chelmsford, MA 01824 (US) |
|
| (72) |
Inventors: |
|
- NAIR, Prasad
Chelmsford, MA 01824 (US)
- DEROSETT, Timothy
Chelmsford, MA 01824 (US)
- KAMBOURIDIS, Dimitrios
Chelmsford, MA 01824 (US)
- NELSON, Jay C.
Chelmsford, MA 01824 (US)
- VELINOV, Ivaylo
Chelmsford, MA 01824 (US)
- CARLISLE, Brian
Chelmsford, MA 01824 (US)
- DODGE, Dalton, P.
Fremont, CA 94538 (US)
|
| (74) |
Representative: HGF |
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HGF Limited
1 City Walk Leeds LS11 9DX Leeds LS11 9DX (GB) |
|