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(11)

EP 4 581 197 A1

(12)

(43) Date of publication: 09.07.2025 Bulletin 2025/28 (21) Application number: 23764416.6 (22) Date of filing: 29.08.2023

(51) International Patent Classification (IPC):  C30B 25/04(2006.01) C23C 16/27(2006.01) C30B 29/04(2006.01) C23C 16/04(2006.01) C30B 25/18(2006.01) (52) Cooperative Patent Classification (CPC): C30B 29/04; C30B 25/04; C30B 25/18; C23C 16/04; C23C 16/274; C23C 16/0272; C23C 16/0245; C01B 32/26; C23C 16/01 (86) International application number: PCT/NL2023/050444 (87) International publication number: WO 2024/049294 (07.03.2024 Gazette 2024/10)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 29.08.2022 NL 2032889 (71) Applicant: Technische Universiteit Delft 2628 CN Delft (NL)	(72) Inventor: ISHIHARA, Ryoichi 2600 AA Delft (NL) (74) Representative: De Vries & Metman  Overschiestraat 180 1062 XK Amsterdam 1062 XK Amsterdam (NL)