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EP 4 584 419 A1

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(43) Date of publication: 16.07.2025 Bulletin 2025/29 (21) Application number: 22813942.4 (22) Date of filing: 03.11.2022

(51) International Patent Classification (IPC):  C23C 14/54(2006.01) H01L 21/67(2006.01) F27D 21/00(2006.01) C30B 25/10(2006.01) G01J 1/42(2006.01) G05D 23/27(2006.01) H01J 37/32(2006.01) C23C 14/08(2006.01) C23C 14/28(2006.01) G05D 23/00(2006.01) B01J 19/12(2006.01) C30B 23/06(2006.01) G01J 5/061(2022.01) H05B 1/02(2006.01) H01L 21/31(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/541; C23C 14/28; H01L 21/67248; C30B 23/063; G05D 23/27; C23C 14/08; H01L 21/67115; H01J 37/32724; B01J 19/0013; B01J 2219/00139; B01J 2219/12 (86) International application number: PCT/EP2022/080733 (87) International publication number: WO 2024/094304 (10.05.2024 Gazette 2024/19)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (71) Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. 80539 München (DE)	(72) Inventors: BRAUN, Wolfgang 74321 Bietigheim-Bissingen (DE) BOSCHKER, Johannes Arnoldus 70619 Stuttgart (DE) (74) Representative: Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB  Martin-Greif-Strasse 1 80336 München 80336 München (DE)