(19)
(11) EP 4 680 687 A1

(12)

(43) Date of publication:
21.01.2026 Bulletin 2026/04

(21) Application number: 24771433.0

(22) Date of filing: 07.03.2024
(51) International Patent Classification (IPC): 
C09K 3/14(2006.01)
B01J 13/20(2006.01)
B24B 37/04(2012.01)
 C09G 1/02(2006.01)
H01L 21/3105(2006.01)
(52) Cooperative Patent Classification (CPC):
C09G 1/02; B24B 37/04; H01L 21/3212; B01J 13/14; C09K 3/1436; C09K 3/1463
(86) International application number:
PCT/US2024/018863
(87) International publication number:
WO 2024/191746 (19.09.2024 Gazette 2024/38)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 15.03.2023 US 202363490412 P

(71) Applicant: Versum Materials US, LLC
Tempe, AZ 85284 (US)

(72) Inventors:
  • JONSCHKER, Gerhard
    64293 Darmstadt (DE)
  • STENDER, Matthias
    Tempe, Arizona 85284 (US)

(74) Representative: Merck Patent Association 
Merck Patent GmbH
64271 Darmstadt
64271 Darmstadt (DE)

   


(54) SOFT POLYSILOXANE CORE-SHELL ABRASIVES FOR CHEMICAL MECHANICAL PLANARIZATION