| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT
NL NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA |
|
Designated Validation States: |
|
GE KH MA MD TN |
| (30) |
Priority: |
26.04.2023 EP 23169946
|
| (71) |
Applicant: Atotech Deutschland GmbH & Co. KG |
|
10553 Berlin (DE) |
|
| (72) |
Inventors: |
|
- ZARWELL, Sebastian
10553 Berlin (DE)
- RAASE, Jennifer
10553 Berlin (DE)
- JANG, Don
10553 Berlin (DE)
- BERNHARD, Tobias
10553 Berlin (DE)
|
| (74) |
Representative: MKS IP Association |
|
Intellectual Property
Erasmusstraße 20
10553 Berlin
10553 Berlin (DE) |
|
