(19)

(11)

EP 4 680 789 A1

(12)

(43) Date of publication: 21.01.2026 Bulletin 2026/04 (21) Application number: 24771322.5 (22) Date of filing: 18.01.2024

(51) International Patent Classification (IPC):  C30B 25/10(2006.01) C30B 25/12(2006.01) C30B 25/08(2006.01) C30B 25/16(2006.01) (52) Cooperative Patent Classification (CPC): C30B 25/10; C30B 25/16; C30B 25/08; C23C 16/46; C23C 16/4411 (86) International application number: PCT/US2024/012082 (87) International publication number: WO 2024/191502 (19.09.2024 Gazette 2024/38)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 16.03.2023 US 202318122530 16.03.2023 US 202318122537 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: MA'AYA, Awse Santa Clara, California 95054 (US) MORADIAN, Ala Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  P.O. Box 330 920 80069 München 80069 München (DE)