(19)

(11)

EP 4 681 023 A1

(12)

(43) Date of publication: 21.01.2026 Bulletin 2026/04 (21) Application number: 24706153.4 (22) Date of filing: 23.02.2024

(51) International Patent Classification (IPC):  G03F 7/00(2006.01) H01L 21/68(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/68; G03F 7/707 (86) International application number: PCT/EP2024/054655 (87) International publication number: WO 2024/193945 (26.09.2024 Gazette 2024/39)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 17.03.2023 EP 23162524 06.04.2023 EP 23167034 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventors: GIJSBERTSEN, Arjan 5500 AH Veldhoven (NL) VAN BEUZEKOM, Aart, Adrianus 5500 AH Veldhoven (NL) LOBBEZOO, Joost 5500 AH Veldhoven (NL) ARTS, Sebastianus, Johannes 5500 AH Veldhoven (NL) VAN AERT, Josephus, Johannes, Petrus 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)