| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT
NL NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA |
|
Designated Validation States: |
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GE KH MA MD TN |
| (30) |
Priority: |
13.03.2023 EP 23161486
28.09.2023 EP 23200625
|
| (71) |
Applicant: ASML Netherlands B.V. |
|
5500 AH Veldhoven (NL) |
|
| (72) |
Inventors: |
|
- ROSET, Niek, Jacobus, Johannes
5500 AH Veldhoven (NL)
- BOS, Edwin, Johannes, Cornelis
5500 AH Veldhoven (NL)
- RAVENSBERGEN, Simon, Karel
5500 AH Veldhoven (NL)
- VAN DEN BERKMORTEL, Frank, Pieter, Albert
5500 AH Veldhoven (NL)
- HUANG, Zhuangxiong
5500 AH Veldhoven (NL)
- HOSSEINI, Sayyed Hamid
5500 AH Veldhoven (NL)
- DEWANJI, Dipanjay
5500 AH Veldhoven (NL)
- HECK, Dennis, Johannes, Franciscus
5500 AH Veldhoven (NL)
- HERTOG, Wladimir, Fransiscus, Gerardus, Maria
5500 AH Veldhoven (NL)
- HOFMAN, Johannes, Marinus, Abraham
5500 AH Veldhoven (NL)
- BLOM, Sander
5500 AH Veldhoven (NL)
- ROPS, Cornelius, Maria
5500 AH Veldhoven (NL)
|
| (74) |
Representative: ASML Netherlands B.V. |
|
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL) |
|
