(19)
(11) EP 4 681 241 A1

(12)

(43) Date of publication:
21.01.2026 Bulletin 2026/04

(21) Application number: 23712503.4

(22) Date of filing: 16.03.2023
(51) International Patent Classification (IPC): 
H01J 37/073(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/073; H01J 2237/06333
(86) International application number:
PCT/EP2023/056799
(87) International publication number:
WO 2024/188471 (19.09.2024 Gazette 2024/38)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(71) Applicants:
  • Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
    80539 München (DE)
  • Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts
    37073 Göttingen (DE)

(72) Inventors:
  • ROPERS, Claus
    37077 Göttingen (DE)
  • FEIST, Armin
    37077 Göttingen (DE)
  • OTTO, Johannes
    37077 Göttingen (DE)
  • HORSTMANN, Jan Gerrit
    37077 Göttingen (DE)
  • VOGELGESANG, Simon
    37077 Göttingen (DE)

(74) Representative: v. Bezold & Partner Patentanwälte - PartG mbB 
Ridlerstraße 57
80339 München
80339 München (DE)

   


(54) ELECTRON MICROSCOPY APPARATUS AND METHOD FOR A TIME RESOLVED LOW ENERGY ELECTRON MICROSCOPY INVESTIGATION OF A SAMPLE