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(11)

EP 4 681 249 A2

(12)

(88) Date of publication A3: 14.11.2024 (43) Date of publication: 21.01.2026 Bulletin 2026/04 (21) Application number: 24775528.3 (22) Date of filing: 18.03.2024

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H10K 71/60(2023.01) H01L 21/283(2006.01) (52) Cooperative Patent Classification (CPC): Y02E 60/36; Y02P 20/133; C25B 1/04; C25B 9/50; C25B 11/052; C25B 11/059; C25B 11/087 (86) International application number: PCT/US2024/020416 (87) International publication number: WO 2024/196874 (26.09.2024 Gazette 2024/39)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 17.03.2023 US 202363452907 P (71) Applicants: The Regents Of The University Of Michigan Ann Arbor, Michigan 48109-1280 (US) Kong, Xianghua Ann Arbor, Michigan (US) Guo, Hong Ann Arbor, Michigan 48109 (US)

(72) Inventors: VANKA, Srinivas Ann Arbor, Michigan 48109 (US) DONG, Wan Jae Ann Arbor, Michigan 48109 (US) MI, Zetian Ann Arbor, Michigan 48109 (US) XIAO, Yixin Ann Arbor, MI 48109 (US) KONG, Xianghua Ann Arbor, Michigan 48109 (US) GUO, Hong Ann Arbor, Michigan 48109 (US) (74) Representative: Abraham, Richard  Maguire Boss 24 East Street St. Ives, Cambridgeshire PE27 5PD St. Ives, Cambridgeshire PE27 5PD (GB)