(19)

(11)

EP 4 681 250 A1

(12)

(43) Date of publication: 21.01.2026 Bulletin 2026/04 (21) Application number: 24710493.8 (22) Date of filing: 29.02.2024

(51) International Patent Classification (IPC):  H01L 21/268(2006.01) H01L 29/861(2006.01) H01L 29/16(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/268; H10D 62/8303; H10D 8/00 (86) International application number: PCT/GB2024/050548 (87) International publication number: WO 2024/189310 (19.09.2024 Gazette 2024/38)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 14.03.2023 GB 202303700 (71) Applicant: Oxford University Innovation Limited Oxford, OX2 0JB (GB)	(72) Inventors: SALTER, Patrick Oxford (GB) KRUGER, Marta Oxford (GB) BOOTH, Martin Oxford (GB) HENDERSON, Calum Oxford (GB) JACKMAN, Richard Oxford (GB) (74) Representative: J A Kemp LLP  80 Turnmill Street London EC1M 5QU London EC1M 5QU (GB)