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(11)

EP 4 740 002 A1

(12)

(43) Date of publication: 13.05.2026 Bulletin 2026/20 (21) Application number: 23762270.9 (22) Date of filing: 06.07.2023

(51) International Patent Classification (IPC):  G01N 21/95(2006.01) G01N 21/88(2006.01) H01L 21/66(2006.01) (52) Cooperative Patent Classification (CPC): G01N 21/9501; G01N 2021/8822; H10P 74/203 (86) International application number: PCT/IB2023/000459 (87) International publication number: WO 2025/008656 (09.01.2025 Gazette 2025/02)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (71) Applicants: UNITY SEMICONDUCTOR 38330 Montbonnot-Saint-Martin (FR) Centre National de la Recherche Scientifique 06905 Sophia Antipolis Cedex (FR)	(72) Inventors: VIENNE, Guillaume 38700 CORENC (FR) HAKOBYAN, Davit 38330 SAINT-ISMIER (FR) GENEVET, Patrice 06130 GRASSE (FR) (74) Representative: IPAZ  Parc Les Algorithmes Bâtiment Platon 91190 Saint Aubin 91190 Saint Aubin (FR)