(19)
(11) EP 4 740 067 A1

(12)

(43) Date of publication:
13.05.2026 Bulletin 2026/20

(21) Application number: 24733238.0

(22) Date of filing: 21.06.2024
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
G02B 5/08(2006.01)
 H01L 21/687(2006.01)
G02B 26/08(2006.01)
(52) Cooperative Patent Classification (CPC):
G03F 7/70266; G03F 7/707; G03F 7/70783; G03F 7/7095; G03F 7/70958; G03F 7/70316
(86) International application number:
PCT/EP2024/067509
(87) International publication number:
WO 2025/008207 (09.01.2025 Gazette 2025/02)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 05.07.2023 EP 23183500

(71) Applicant: ASML Netherlands B.V.
5500 AH Veldhoven (NL)

(72) Inventors:
  • ALLSOP, Nicholas, Alan
    5500 AH Veldhoven (NL)
  • WIGGERS, Frank, Bert
    5500 AH Veldhoven (NL)

(74) Representative: ASML Netherlands B.V. 
Corporate Intellectual Property P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL)

   


(54) OBJECT HOLDER, OBJECT TABLE, OPTICAL ELEMENT AND METHOD OF CONTROLLING THE FLATNESS OF A SURFACE, AND THEIR USE IN A LITHOGRAPHIC METHOD OR APPARATUS