(19)

(11)

EP 4 740 236 A1

(12)

(43) Date of publication: 13.05.2026 Bulletin 2026/20 (21) Application number: 24836480.4 (22) Date of filing: 18.06.2024

(51) International Patent Classification (IPC):  H01J 37/317(2006.01) H01J 37/08(2006.01) (52) Cooperative Patent Classification (CPC): H01J 49/0404 (86) International application number: PCT/US2024/034548 (87) International publication number: WO 2025/010142 (09.01.2025 Gazette 2025/02)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 06.07.2023 US 202363512167 P (71) Applicant: Agilent Technologies, Inc. Santa Clara, CA 95051-7201 (US)	(72) Inventors: ZEKAVAT, Behrooz Santa Clara, California 95051-7201 (US) BERTSCH, James L. Santa Clara, California 95051-7201 (US) (74) Representative: Grünecker Patent- und Rechtsanwälte PartG mbB  Leopoldstraße 4 80802 München 80802 München (DE)