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(11)

EP 4 740 240 A1

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(43) Date of publication: 13.05.2026 Bulletin 2026/20 (21) Application number: 24731362.0 (22) Date of filing: 10.06.2024

(51) International Patent Classification (IPC):  H01L 21/67(2006.01) (52) Cooperative Patent Classification (CPC): H10P 72/00 (86) International application number: PCT/EP2024/065872 (87) International publication number: WO 2025/011842 (16.01.2025 Gazette 2025/03)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 07.07.2023 EP 23184264 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)

(72) Inventors: OTTENS, Joost, Jeroen 5500 AH Veldhoven (NL) DE JAGER, Pieter, Willem, Herman 5500 AH Veldhoven (NL) HUMPHREYS, Bedwyr 5500 AH Veldhoven (NL) BENSCHOP, Jozef, Petrus, Henricus 5500 AH Veldhoven (NL) VAN ZWET, Erwin, John 5500 AH Veldhoven (NL) VAN RIEL, Martinus, Cornelius, Johannes, Maria 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)