(19)

(11)

EP 4 770 831 A1

(12)

(43) Date of publication: 08.07.2026 Bulletin 2026/28 (21) Application number: 24861281.4 (22) Date of filing: 03.09.2024

(51) International Patent Classification (IPC):  B25J 9/04(2006.01) B25J 11/00(2006.01) H01L 21/677(2006.01) (52) Cooperative Patent Classification (CPC): B25J 9/043; B25J 9/126; B25J 11/0095; H10P 72/3302; H10P 72/7602 (86) International application number: PCT/US2024/045027 (87) International publication number: WO 2025/050119 (06.03.2025 Gazette 2025/10)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 01.09.2023 US 202363580157 P (71) Applicant: Brooks Automation US, LLC Chelmsford, MA 01824 (US)	(72) Inventors: McLELLAN, Matthew, J. Chelmsford, MA 01824 (US) CAVENEY, Robert, T. Windham, NH 03087 (US) (74) Representative: Dehns Germany Partnerschaft mbB  Theresienstraße 6-8 80333 München 80333 München (DE)