(19)

(11)

EP 4 771 668 A1

(12)

(43) Date of publication: 08.07.2026 Bulletin 2026/28 (21) Application number: 24929971.0 (22) Date of filing: 03.09.2024

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) C30B 29/40(2006.01) C30B 25/02(2006.01) H10N 52/01(2023.01) (52) Cooperative Patent Classification (CPC): C30B 29/403; C30B 23/02; H10N 30/853; H10N 30/076; H10P 14/3416; H10P 14/2908; H10P 14/2905; H10D 1/68 (86) International application number: PCT/US2024/045029 (87) International publication number: WO 2025/193258 (18.09.2025 Gazette 2025/38)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 31.08.2023 US 202363535779 P (71) Applicant: The Regents of the University of Michigan Ann Arbor, Michigan 48109-1280 (US)	(72) Inventors: MI, Zetian Michigan 48109 (US) WANG, Ding Michigan 48109 (US) MORTAZAWI, Amir Michigan 48109 (US) (74) Representative: Abraham, Richard  Maguire Boss 24 East Street St. Ives, Cambridgeshire PE27 5PD St. Ives, Cambridgeshire PE27 5PD (GB)