(19)

(11)

EP 4 771 669 A1

(12)

(43) Date of publication: 08.07.2026 Bulletin 2026/28 (21) Application number: 24775996.2 (22) Date of filing: 27.08.2024

(51) International Patent Classification (IPC):  H01L 21/20(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/048; H10P 14/2922; H10P 14/3238; H10P 14/3241; H10P 14/3414; H10P 14/3411; H10P 14/3442; H10P 14/3444; H10P 14/27; H10P 14/22; H10P 14/24 (86) International application number: PCT/IB2024/058298 (87) International publication number: WO 2025/046453 (06.03.2025 Gazette 2025/10)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 29.08.2023 US 202363579324 P (71) Applicants: Yissum Research Development Company of the Hebrew University of Jerusalem LLC 91390 Jerusalem (IL) Sa'ar, Amir 9076415 Mevaseret Zion (IL) Zenou, Michael 7177871 Modiin (IL)

(72) Inventors: SA'AR, Amir 9076415 Mevaseret Zion (IL) ZENOU, Michael 7177871 Modiin (IL) (74) Representative: Boult Wade Tennant LLP  Salisbury Square House 8 Salisbury Square London EC4Y 8AP London EC4Y 8AP (GB)