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(11)

EP 4 771 671 A1

(12)

(43) Date of publication: 08.07.2026 Bulletin 2026/28 (21) Application number: 24861276.4 (22) Date of filing: 03.09.2024

(51) International Patent Classification (IPC):  H01L 21/20(2006.01) H10B 51/00(2023.01) C30B 29/40(2006.01) H01L 21/02(2006.01) H10B 53/00(2023.01) H10D 48/00(2025.01) (52) Cooperative Patent Classification (CPC): C30B 29/40; C30B 29/60; C30B 25/02; H10D 62/80; H10D 62/121; H10D 62/118; H10D 62/122; H10H 20/817; H10H 20/824; H10H 20/819; H10D 30/701; H10D 64/689; H10P 14/3402; H10P 14/3416; H10P 14/22 (86) International application number: PCT/US2024/044980 (87) International publication number: WO 2025/050107 (06.03.2025 Gazette 2025/10)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 01.09.2023 US 202363536257 P (71) Applicant: The Regents of the University of Michigan Ann Arbor, Michigan 48109-1280 (US)	(72) Inventors: WANG, Ding Michigan 48109 (US) WANG, Ping Michigan 48109 (US) MI, Zetian Michigan 48109 (US) (74) Representative: Abraham, Richard et al Maguire Boss 24 East Street St. Ives, Cambridgeshire PE27 5PD St. Ives, Cambridgeshire PE27 5PD (GB)