(19)
(11) EP 4 798 664 A1

(12)

(43) Date of publication:
02.09.2026 Bulletin 2026/36

(21) Application number: 24794151.1

(22) Date of filing: 24.10.2024
(51) International Patent Classification (IPC): 
C09G 1/02(2006.01)
H01L 21/321(2006.01)
C09K 3/14(2006.01)
H01L 21/3105(2006.01)
(52) Cooperative Patent Classification (CPC):
C09G 1/02; C09K 3/1463; C09K 3/1445; H10P 95/062; H10P 52/403
(86) International application number:
PCT/EP2024/080015
(87) International publication number:
WO 2025/088005 (01.05.2025 Gazette 2025/18)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 26.10.2023 EP 23206201

(71) Applicant: BASF SE
67056 Ludwigshafen am Rhein (DE)

(72) Inventors:
  • WEI, Te Yu
    TAOYUAN CITY, 32853 (TW)
  • YEH, Shih Chieh
    TAOYUAN CITY, 32853 (TW)
  • TSAI, Tsung Yu
    TAOYUAN CITY, 32853 (TW)
  • LAUTER, Michael
    67056 Ludwigshafen (DE)

(74) Representative: Eisenführ Speiser 
Patentanwälte Rechtsanwälte PartGmbB Am Kaffee-Quartier 3
28217 Bremen
28217 Bremen (DE)

   


(54) COMPOSITIONS AND METHODS FOR REMOVAL OF TUNGSTEN AND DIELECTRIC LAYERS