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(11)

EP 4 798 757 A1

(12)

(43) Date of publication: 02.09.2026 Bulletin 2026/36 (21) Application number: 24883055.6 (22) Date of filing: 15.08.2024

(51) International Patent Classification (IPC):  C23C 16/54(2006.01) C23C 16/02(2006.01) C23C 16/04(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/545; C23C 16/042; C23C 16/4586; H01M 4/0421; H10P 72/0428; H10P 72/0452; H10P 72/0442; H10P 72/0468 (86) International application number: PCT/US2024/042385 (87) International publication number: WO 2025/090161 (01.05.2025 Gazette 2025/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 26.10.2023 US 202363593430 P (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: ABE, Shinobu Osaka, Osaka 530-0001 (JP) KURITA, Shinichi Santa Clara, California 95054 (US) SHEN, Duoyan Santa Clara, California 95054 (US) HIRANO, Yoshiharu Osaka, Osaka 530-0001 (JP) (74) Representative: Zimmermann & Partner Patentanwälte mbB  P.O. Box 330 920 80069 München 80069 München (DE)