(19)

(11)

EP 4 799 010 A1

(12)

(43) Date of publication: 02.09.2026 Bulletin 2026/36 (21) Application number: 24790600.1 (22) Date of filing: 21.10.2024

(51) International Patent Classification (IPC):  G03F 1/84(2012.01) G03F 7/20(2006.01) G03F 1/76(2012.01) G01N 21/956(2006.01) (52) Cooperative Patent Classification (CPC): G03F 1/76; G03F 1/84; G03F 7/70775; G01N 21/956; G01N 21/9501 (86) International application number: PCT/EP2024/079669 (87) International publication number: WO 2025/087841 (01.05.2025 Gazette 2025/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 23.10.2023 EP 23205186 (71) Applicant: MYCRONIC AB 183 03 Täby (SE)	(72) Inventor: WALTHER, Jonas 169 37 Solna (SE) (74) Representative: AWA Sweden AB  Box 5117 200 71 Malmö 200 71 Malmö (SE)