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EP 4 799 017 A1

(12)

(43) Date of publication: 02.09.2026 Bulletin 2026/36 (21) Application number: 24894945.5 (22) Date of filing: 20.11.2024

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) H01L 23/544(2006.01) G03F 9/00(2006.01) (52) Cooperative Patent Classification (CPC): G03F 7/70633; G03F 7/70475 (86) International application number: PCT/US2024/056582 (87) International publication number: WO 2025/111293 (30.05.2025 Gazette 2025/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 21.11.2023 US 202363601539 P (71) Applicant: Psiquantum, Corp. Palo Alto, CA 94304 (US)	(72) Inventors: HOSLER, Erik R. Palo Alto, California 94304 (US) LICAUSI, Nicholas V. Palo Alto, California 94304 (US) (74) Representative: Hamer, Thomas Daniel et al Kilburn & Strode LLP Lacon London 84 Theobalds Road London WC1X 8NL London WC1X 8NL (GB)