(19)

(11)

EP 4 799 197 A2

(12)

(88) Date of publication A3: 11.09.2025 (43) Date of publication: 02.09.2026 Bulletin 2026/36 (21) Application number: 24928632.9 (22) Date of filing: 28.10.2024

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) (52) Cooperative Patent Classification (CPC): H10P 14/2904; H10P 14/2926; H10P 14/3216; H10P 14/3442; H10P 14/3416; H10P 14/22; H10P 14/24 (86) International application number: PCT/US2024/053175 (87) International publication number: WO 2025/188374 (11.09.2025 Gazette 2025/37)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 26.10.2023 US 202363593393 P (71) Applicant: The Regents of the University of Michigan Ann Arbor, Michigan 48109 (US)	(72) Inventors: HU, Mingtao Ann Arbor, Michigan 48109 (US) MONDAL, Shubham Ann Arbor, Michigan 48109 (US) WANG, Ping Ann Arbor, Michigan 48109 (US) WANG, Ding Ann Arbor, Michigan 48109 (US) MI, Zetian Ann Arbor, Michigan 48109 (US) (74) Representative: Abraham, Richard et al Maguire Boss 24 East Street St. Ives, Cambridgeshire PE27 5PD St. Ives, Cambridgeshire PE27 5PD (GB)