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EP 4 817 087 A1

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(43) Date of publication: 07.10.2026 Bulletin 2026/41 (21) Application number: 24898564.0 (22) Date of filing: 25.11.2024

(51) International Patent Classification (IPC):  H01L 21/28(2025.01) C23C 14/34(2006.01) H01L 21/02(2006.01) C23C 14/14(2006.01) C23C 14/54(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/02; C23C 14/165; C23C 14/5806; H10P 14/44 (86) International application number: PCT/US2024/057227 (87) International publication number: WO 2025/117408 (05.06.2025 Gazette 2025/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 29.11.2023 US 202318523238 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)

(72) Inventors: ZHONG, Yaoying Singapore Technology Pte Ltd 10 Science Park Road, 02-03, The Alpha Science Park II Singapore 117684 (SG) XU, Haomin Singapore Technology Pte Ltd 10 Science Park Road, 02-03, The Alpha Science Park II Singapore 117684 (SG) HOI, Siew Kit Singapore Technology Pte Ltd 10 Science Park Road, 02-03, The Alpha Science Park II Singapore 117684 (SG) SOH, Jay Min Singapore Technology Pte Ltd 10 Science Park Road, 02-03, The Alpha Science Park II Singapore 117684 (SG) TAN, Xiao Singapore Technology Pte Ltd 10 Science Park Road, 02-03, The Alpha Science Park II Singapore 117684 (SG) CHOO, Li Ying Singapore Technology Pte Ltd 10 Science Park Road, 02-03, The Alpha Science Park II Singapore 117684 (SG) (74) Representative: Zimmermann & Partner Patentanwälte mbB  P.O. Box 330 920 80069 München 80069 München (DE)