(19)
(11) EP 4 817 088 A1

(12)

(43) Date of publication:
07.10.2026 Bulletin 2026/41

(21) Application number: 24898572.3

(22) Date of filing: 25.11.2024
(51) International Patent Classification (IPC): 
H01L 21/321(2006.01)
H01L 23/00(2006.01)
 H01L 21/02(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/321; H10P 72/0454; H10W 40/259
(86) International application number:
PCT/US2024/057241
(87) International publication number:
WO 2025/117418 (05.06.2025 Gazette 2025/23)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 30.11.2023 US 202363604543 P

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • GORCHICHKO, Maria
    Santa Clara, California 95054 (US)
  • JEON, Yoocharn
    Santa Clara, California 95054 (US)
  • SONG, Liang
    Santa Clara, California 95054 (US)
  • KRISHNAN, Siddarth
    Santa Clara, California 95054 (US)
  • LIU, Chengyu
    Santa Clara, California 95054 (US)
  • ZHU, Meng
    Santa Clara, California 95054 (US)
  • LI, Kun
    Santa Clara, California 95054 (US)
  • APPELL, Jason A.
    Santa Clara, California 95054 (US)
  • BASKER, Veeraraghavan S.
    Santa Clara, California 95054 (US)
  • BRIGGS, Benjamin D.
    Santa Clara, California 95054 (US)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
P.O. Box 330 920
80069 München
80069 München (DE)

   


(54) METHODS FOR ENABLING CHEMICAL MECHANICAL POLISHING AND BONDING OF ALUMINUM-CONTAINING MATERIALS