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(11)

EP 4 817 370 A1

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(43) Date of publication: 07.10.2026 Bulletin 2026/41 (21) Application number: 24821713.5 (22) Date of filing: 25.11.2024

(51) International Patent Classification (IPC):  H10D 30/67(2025.01) H10D 86/60(2025.01) H10D 30/01(2025.01) (52) Cooperative Patent Classification (CPC): H10D 30/0316; H10D 30/6732; H10D 30/6725 (86) International application number: PCT/US2024/057213 (87) International publication number: WO 2025/117398 (05.06.2025 Gazette 2025/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 29.11.2023 US 202363603807 P (71) Applicant: Versum Materials US, LLC Tempe, AZ 85284 (US)	(72) Inventor: KOUSHAN, Foroozan Sarah Burlington, Massachusetts 01803 (US) (74) Representative: Merck Patent Association  Merck Patent GmbH 64271 Darmstadt 64271 Darmstadt (DE)