(19)
(11) EP 4 823 796 A1

(12)

(43) Date of publication:
21.10.2026 Bulletin 2026/43

(21) Application number: 24838082.6

(22) Date of filing: 05.12.2024
(51) International Patent Classification (IPC): 
B24B 37/005(2012.01)
B24B 37/34(2012.01)
B24B 57/02(2006.01)
 B24B 37/04(2012.01)
B24B 57/00(2006.01)
(52) Cooperative Patent Classification (CPC):
B24B 57/02; B24B 37/34; B24B 37/04; B24B 37/0056; B24B 57/00
(86) International application number:
PCT/US2024/058714
(87) International publication number:
WO 2025/128405 (19.06.2025 Gazette 2025/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 11.12.2023 US 202363608749 P

(71) Applicant: ASM America, Inc.
Phoenix, AZ 85034 (US)

(72) Inventors:
  • TROJAN, Daniel Ray
    Phoenix, Arizona 85034 (US)
  • SHUGRUE, John Kevin
    Phoenix, Arizona 85034 (US)

(74) Representative: Buzzi, Notaro & Antonielli d'Oulx S.p.A. 
Corso Vittorio Emanuele II, 6
10123 Torino
10123 Torino (IT)

   


(54) APPARATUS AND METHOD FOR IN-SITU CHEMICAL SEPARATION AND RECIRCULATION IN A CHEMICAL MECHANICAL PROCESSING SYSTEM