| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT
NL NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA |
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Designated Validation States: |
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GE KH MA MD TN |
| (30) |
Priority: |
15.12.2023 US 202363610663 P
|
| (71) |
Applicant: Lam Research Corporation |
|
Fremont, CA 94538 (US) |
|
| (72) |
Inventors: |
|
- FOX, Alexander R.
Fremont, California 94538 (US)
- MANDIA, David Joseph
Fremont, California 94538 (US)
- WU, Bo
Fremont, California 94538 (US)
- DONNELLY, Sean M.
Fremont, California 94538 (US)
- PADMANABHA, Anantha
Fremont, California 94538 (US)
- INGLE, Trupti Sudhakar
Fremont, California 94538 (US)
- HOLLINGSWORTH, Joel
Fremont, California 94538 (US)
- SMITH, Joel
Fremont, California 94538 (US)
- BLAKENEY, Kyle
Fremont, California 94538 (US)
- ZENG, Madison
Fremont, California 94538 (US)
- RAO, Pratima
Fremont, California 94538 (US)
|
| (74) |
Representative: Mewburn Ellis LLP |
|
Aurora Building
Counterslip
Bristol BS1 6BX
Bristol BS1 6BX (GB) |
|
