(19)
(11) EP 4 824 314 A1

(12)

(43) Date of publication:
21.10.2026 Bulletin 2026/43

(21) Application number: 24904936.2

(22) Date of filing: 13.12.2024
(51) International Patent Classification (IPC): 
C23C 14/34(2006.01)
C22C 14/00(2006.01)
C22C 27/04(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 2237/332; B23K 2103/08; H01J 37/3426; B23K 20/021; H01J 37/3491; C23C 14/3407; C23C 14/3414
(86) International application number:
PCT/US2024/059951
(87) International publication number:
WO 2025/128940 (19.06.2025 Gazette 2025/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 15.12.2023 US 202363610598 P
10.12.2024 US 202418975119

(71) Applicant: Solstice Advanced Materials US Inc.
Morris Plains, New Jersey 07950 (US)

(72) Inventors:
  • WU, Xiaodan
    Charlotte, NC 28202 (US)
  • KIM, Jaeyeon
    Charlotte, NC 28202 (US)
  • STROTHERS, Susan, D.
    Charlotte, NC 28202 (US)
  • MOHANTY, Rashmi
    Charlotte, NC 28202 (US)
  • IM, Alicia
    Charlotte, NC 28202 (US)

(74) Representative: Withers & Rogers 
2 London Bridge
London SE1 9RA
London SE1 9RA (GB)

   


(54) MOLYBDENUM SPUTTERING TARGET ASSEMBLY AND METHOD OF MAKING