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EP 4 824 315 A1

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(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24904972.7 (22) Date of filing: 13.12.2024

(51) International Patent Classification (IPC):  C23C 16/22(2006.01) H01L 21/02(2006.01) C23C 16/24(2006.01) (52) Cooperative Patent Classification (CPC): C07F 9/06; C23C 16/345; C23C 16/45553; C23C 16/45542; C23C 16/452; C23C 16/308; C23C 16/505; C23C 16/4554; C23C 16/24 (86) International application number: PCT/US2024/060065 (87) International publication number: WO 2025/129020 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 15.12.2023 US 202363610434 P 01.03.2024 US 202463560233 P 01.03.2024 US 202463560276 P 01.03.2024 US 202463560303 P (71) Applicant: ASM IP Holding B.V. 1322 AP Almere (NL)

(72) Inventors: VERVUURT, René Henricus Jozef 1322 AP Almere (NL) DEZELAH, Charles 1322 AP Almere (NL) ROMERO, Patricio 1322 AP Almere (NL) PORE, Viljami 1322 AP Almere (NL) (74) Representative: V.O.  P.O. Box 87930 2508 DH Den Haag 2508 DH Den Haag (NL)