(19)

(11)

EP 4 824 319 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24904578.2 (22) Date of filing: 22.08.2024

(51) International Patent Classification (IPC):  C23F 1/10(2006.01) C23F 1/38(2006.01) C23F 1/14(2006.01) H01L 21/3213(2006.01) (52) Cooperative Patent Classification (CPC): C09K 13/04; C23C 18/24; C23C 18/1653; C23C 18/32; C23C 18/30 (86) International application number: PCT/US2024/043422 (87) International publication number: WO 2025/128164 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 11.12.2023 US 202318534907 (71) Applicant: MacDermid Enthone Inc. Waterbury, CT 06702 (US)	(72) Inventors: HERDMAN, Roderick, D. Tamworth, Staffordshire B78 2JQ (GB) CHAPANERI, Roshan, V. Coventry CV3 5AT (GB) (74) Representative: Boult Wade Tennant LLP  Salisbury Square House 8 Salisbury Square London EC4Y 8AP London EC4Y 8AP (GB)