(19)

(11)

EP 4 824 570 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24813481.9 (22) Date of filing: 08.11.2024

(51) International Patent Classification (IPC):  G01R 31/66(2020.01) G01R 31/28(2006.01) G01R 31/50(2020.01) G03F 7/00(2006.01) (52) Cooperative Patent Classification (CPC): G01R 35/00; G01R 31/66; G01R 31/2801; G01R 31/50; G03F 7/7085; G03F 7/70533; G03F 7/70991; G03F 7/706835 (86) International application number: PCT/IB2024/061123 (87) International publication number: WO 2025/125936 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 15.12.2023 US 202363610907 P (71) Applicant: Cymer, LLC San Diego, CA 92127 (US)	(72) Inventors: KNIGHT, Laura, Elizabeth San Diego, California 92127 (US) KASEFF, Charles, Abraham San Diego, California 92127 (US) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)