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(11)

EP 4 824 593 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24904885.1 (22) Date of filing: 12.12.2024

(51) International Patent Classification (IPC):  G02B 6/00(2006.01) G02B 27/01(2006.01) G02B 5/08(2006.01) G02B 5/18(2006.01) G02B 27/09(2006.01) G02B 6/26(2006.01) (52) Cooperative Patent Classification (CPC): G02B 27/0172; G02B 27/0081; G02B 2027/0125; G02B 5/1819; G02B 27/0018; G02B 2027/0118 (86) International application number: PCT/US2024/059817 (87) International publication number: WO 2025/128849 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 13.12.2023 US 202363609664 P (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: FU, Jinxin Santa Clara, California 95054 (US) SUN, Yangyang Santa Clara, California 95054 (US) HE, Sihui Santa Clara, California 95054 (US) GODET, Ludovic Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  P.O. Box 330 920 80069 München 80069 München (DE)