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EP 4 824 613 A1

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(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24812091.7 (22) Date of filing: 18.11.2024

(51) International Patent Classification (IPC):  G03F 1/36(2012.01) G03F 7/00(2006.01) (52) Cooperative Patent Classification (CPC): G03F 1/36; G03F 7/705 (86) International application number: PCT/EP2024/082675 (87) International publication number: WO 2025/124841 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 15.12.2023 US 202363610798 P (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)

(72) Inventors: ONOSE, Alexandru 5500 AH Veldhoven (NL) RUIZ, Hans-Christian 5500 AH Veldhoven (NL) BOTARI, Tiago 5500 AH Veldhoven (NL) VAN KRAAIJ, Markus, Gerardus, Martinus, Maria 5500 AH Veldhoven (NL) BOONE, Robert, Elliott San Jose, California 95134 (US) HAMOUDA, Ayman San Jose, California 95134 (US) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)