(19)

(11)

EP 4 824 615 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24904508.9 (22) Date of filing: 10.12.2024

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) G03F 7/00(2006.01) H01S 3/09(2006.01) (52) Cooperative Patent Classification (CPC): G03F 7/70033; H01S 3/0903 (86) International application number: PCT/SG2024/050783 (87) International publication number: WO 2025/128000 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 14.12.2023 SG 10202303516X (71) Applicant: Nanyang Technological University Singapore 639798 (SG)	(72) Inventors: DEMIR, Hilmi Volkan Singapore 639798 (SG) WONG, Liang Jie Singapore 639798 (SG) (74) Representative: Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte  Am Brauhaus 8 01099 Dresden 01099 Dresden (DE)