(19)

(11)

EP 4 824 626 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24905035.2 (22) Date of filing: 13.12.2024

(51) International Patent Classification (IPC):  G05B 19/418(2006.01) (52) Cooperative Patent Classification (CPC): G05B 19/41875; G05B 2219/32188; G05B 2219/45031 (86) International application number: PCT/US2024/060215 (87) International publication number: WO 2025/129127 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 15.12.2023 US 202318542562 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: LI, Thomas Ho Fai Santa Clara, California 95054 (US) HU, Xiaoer Santa Clara, California 95054 (US) ISLAM RAHIM, Imaan Seraphine Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  P.O. Box 330 920 80069 München 80069 München (DE)