OPTICAL SYSTEM FOR A PLURALITY OF PRIMARY BEAMLETS, CHARGED PARTICLE MULTI-BEAM APPARATUS AND METHOD OF FOCUSING A PLURALITY OF PRIMARY BEAMLETS - Patent 4824847

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EP 4 824 847 A1

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(43)	Date of publication:
	21.10.2026 Bulletin 2026/43

(21)	Application number: 24829390.4

(22)	Date of filing: 11.12.2024

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International Patent Classification (IPC):

H01J 37/12^(2006.01)

H01J 37/153^(2006.01)

(52)	Cooperative Patent Classification (CPC):
	H01J 37/153; H01J 2237/1532; H01J 2237/1516; H01J 37/12; H01J 2237/1205; H01J 2237/1202

(86)	International application number:
	PCT/EP2024/085606

(87)	International publication number:
	WO 2025/125289 (19.06.2025 Gazette 2025/25)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA
	Designated Validation States:
	GE KH MA MD TN

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Priority:

12.12.2023 US 202318536914

(71)	Applicants:
	ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH 85551 Heimstetten (DE) Technische Universiteit Delft 2628 CN Delft (NL)

(72)	Inventor:
	KRUIT, Pieter 2611EB Delft (NL)

(74)	Representative: Zimmermann & Partner Patentanwälte mbB
	P.O. Box 330 920 80069 München 80069 München (DE)

(54)	OPTICAL SYSTEM FOR A PLURALITY OF PRIMARY BEAMLETS, CHARGED PARTICLE MULTI-BEAM APPARATUS AND METHOD OF FOCUSING A PLURALITY OF PRIMARY BEAMLETS