(19)

(11)

EP 4 824 848 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24820359.8 (22) Date of filing: 03.12.2024

(51) International Patent Classification (IPC):  H01J 37/147(2006.01) H01J 37/04(2006.01) H01J 37/28(2006.01) (52) Cooperative Patent Classification (CPC): H01J 37/28; H01J 37/1474; H01J 2237/2817; H01J 2237/04; H01J 37/04 (86) International application number: PCT/EP2024/084581 (87) International publication number: WO 2025/125017 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 13.12.2023 US 202363609855 P (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventors: ZHOU, Yongjian San Jose, California 95134 (US) GONG, Zizhou San Jose, California 95134 (US) JI, Xiaoyu San Jose, California 95134 (US) REN, Weiming San Jose, California 95134 (US) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)