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(11)

EP 4 824 857 A1

(12)

(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24824757.9 (22) Date of filing: 13.12.2024

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H10D 30/47(2025.01) H10D 64/23(2025.01) H01L 21/441(2006.01) H10D 62/80(2025.01) (52) Cooperative Patent Classification (CPC): H10D 64/251; H10D 30/481; H10D 62/883 (86) International application number: PCT/EP2024/086185 (87) International publication number: WO 2025/125554 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 13.12.2023 EP 23216342 (71) Applicant: Imec VZW 3001 Leuven (BE)	(72) Inventor: MORIN, Pierre 3001 Leuven (BE) (74) Representative: Lind Edlund Kenamets Intellectual Property AB  Kungsportsavenyn 25 411 36 Göteborg 411 36 Göteborg (SE)