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EP 4 824 862 A1

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(43) Date of publication: 21.10.2026 Bulletin 2026/43 (21) Application number: 24820818.3 (22) Date of filing: 18.11.2024

(51) International Patent Classification (IPC):  H01L 21/283(2006.01) H10D 30/01(2025.01) H01L 21/768(2006.01) H10D 64/23(2025.01) B82Y 10/00(2011.01) H01L 23/528(2006.01) H10D 30/00(2025.01) H10D 64/01(2025.01) H10D 84/01(2026.01) (52) Cooperative Patent Classification (CPC): B82Y 10/00; H10D 30/501; H10D 30/0198; H10D 84/832; H10D 64/251; H10D 64/017; H10D 84/0149; H10D 62/116; H10D 62/822; H10D 84/0151; H10W 20/069; H10W 20/023; H10W 20/427; H10W 20/0242; H10W 20/481; H10W 20/0253 (86) International application number: PCT/IB2024/061521 (87) International publication number: WO 2025/125947 (19.06.2025 Gazette 2025/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: GE KH MA MD TN (30) Priority: 13.12.2023 US 202318537943 (71) Applicant: International Business Machines Corporation Armonk, New York 10504 (US)	(72) Inventors: MUKESH, Sagarika ALBANY, New York 12203 (US) LI, Tao ALBANY, New York 12203 (US) XIE, Ruilong ALBANY, New York 12203 (US) LOUBET, Nicolas ALBANY, New York 12203 (US) (74) Representative: IBM United Kingdom Limited  Intellectual Property Law Hursley Park Winchester, Hampshire SO21 2JN Winchester, Hampshire SO21 2JN (GB)