(19)
(11) EP 4 825 120 A1

(12)

(43) Date of publication:
21.10.2026 Bulletin 2026/43

(21) Application number: 24846634.4

(22) Date of filing: 11.12.2024
(51) International Patent Classification (IPC): 
H05H 7/08(2006.01)
H01J 37/08(2006.01)
H01J 27/18(2006.01)
(52) Cooperative Patent Classification (CPC):
H05H 2007/082; H01J 37/08; H01J 27/18; H05H 7/08; H05H 1/4652; H01J 2237/061; H01J 2237/0817
(86) International application number:
PCT/CZ2024/050081
(87) International publication number:
WO 2025/124625 (19.06.2025 Gazette 2025/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 12.12.2023 CZ 20230480

(71) Applicant: TESCAN GROUP a.s.
62300 Brno (CZ)

(72) Inventor:
  • HAVLÍCEK, Lukás
    56102 Dolní Dobrouc (CZ)

   


(54) PLASMA ION SOURCE