| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT
NL NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA |
|
Designated Validation States: |
|
GE KH MA MD TN |
| (30) |
Priority: |
14.12.2023 US 202363609925 P
|
| (71) |
Applicant: MKS Inc. |
|
Andover, MA 01810 (US) |
|
| (72) |
Inventors: |
|
- LUU, Ky
Andover, Massachusetts 01810 (US)
- BROOKS, Raymond
Andover, Massachusetts 01810 (US)
|
| (74) |
Representative: MKS IP Association |
|
Intellectual Property
Erasmusstraße 20
10553 Berlin
10553 Berlin (DE) |
|
