(19)
(11) EP 0 472 108 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
24.02.1993 Bulletin 1993/08

(43) Date of publication A2:
26.02.1992 Bulletin 1992/09

(21) Application number: 91113653.9

(22) Date of filing: 14.08.1991
(51) International Patent Classification (IPC)5: G01L 9/12, G01L 9/06
(84) Designated Contracting States:
DE FR GB

(30) Priority: 24.08.1990 JP 221370/90
31.10.1990 JP 292093/90

(71) Applicant: NGK SPARK PLUG CO., LTD
Mizuho-ku Nagoya-shi Aichi (JP)

(72) Inventors:
  • Mizumoto, Katsuyoshi, c/o NGK Spark Plug Co., Ltd.
    Nagoya-shi, Aichi (JP)
  • Kitsukawa, Kanehisa, c/o NGK Spark Plug Co., Ltd.
    Nagoya-shi, Aichi (JP)
  • Yasuda, Toshikatsu, c/o NGK Spark Plug Co., Ltd.
    Nagoya-shi, Aichi (JP)
  • Kojima, Takao, c/o NGK Spark Plug Co., Ltd.
    Nagoya-shi, Aichi (JP)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)


(56) References cited: : 
   
       


    (54) A pressure sensor using a ceramic diaphragm


    (57) A pressure sensor having a ceramic substrate (1) formed from a first unsintered ceramic material, and a diaphragm (2) capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material. The diaphragm is fixed to the periphery of a surface of the ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials.






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