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(11) | EP 0 657 373 A3 |
| (12) | EUROPEAN PATENT APPLICATION |
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| (54) | Vacuum chuck apparatus |
| (57) In a vacuum chuck apparatus for chucking an article, a plurality of movable suction
cups (12,13) are mounted on a support member (1) to be movable up and down relative
to the support member between an operative position where each of the movable suction
cups can attract the article by suction and a retracted position above the operative
position. A plurality of air cylinders (21,22) move the respective suction cups independently
from each other between the operative position and the retracted position. An article
size designating circuit (80) outputs a size signal representing the size of the article
to be chucked, and a controller (70) controls the air cylinders according to the size
signal so that a part of the movable suction cups which are not necessary for chucking
the article of the size represented by the size signal are held in the retracted position
and the other suction cups are held in the operative position. |