(19)
(11) EP 1 085 565 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
04.07.2001 Bulletin 2001/27

(43) Date of publication A2:
21.03.2001 Bulletin 2001/12

(21) Application number: 00116963.0

(22) Date of filing: 07.08.2000
(51) International Patent Classification (IPC)7: H01L 21/56
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 14.09.1999 JP 26061499

(71) Applicant: Casio Computer Co., Ltd.
Shibuya-ku, Tokyo (JP)

(72) Inventor:
  • Osamu, Kuwabara
    Tokyo (JP)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) Semiconductor device having sealing film formed on the surface having columnar electrodes thereon and method of manufacturing the same


(57) A sealing film (18) is formed by a screen printing method. In this case, the temperature of the printing table (13) is set at about 30 to 50°C by the heat generation from a planar heater (16) arranged within the printing table (13). A liquid sealing resin having a relatively high viscosity of about 500,000 to 1,500,000 cPS is used for forming the sealing film (18). However, the liquid sealing film is warmed by the printing table (13) to about 30 to 50°C. As a result, the viscosity of the liquid sealing resin is lowered to about 50,000 to 200,000 cPS. After the curing, the viscosity of the sealing film (18) is brought back to the original value of about 500,000 to 1,500,000 cPS.






Search report