(57) An interferometer and method for performing preliminary and main measurements quickly
and with high precision are provided. Laser light and white light are successively
introduced to the same interferometer booth. Laser light is introduced from a laser
light source, and the interference fringe with a reference mirror as a reference is
detected using a CCD and a personal computer. By setting the interference fringe to
a preset value, the position of a work is adjusted. White light from a halogen lamp
is then introduced, a corner cube moving mount is moved, interference fringe with
a reference mirror as a reference is detected, and preliminary measurement of the
work is performed. Next, laser light is introduced, interference fringe with a reference
mirror as a reference is detected, and the main measurement of the work is performed.
Because the preliminary and main measurements are performed within the same interferometer
booth, the number of steps is reduced and high precision preliminary measurement can
be performed.
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